ME 553 (Mfg 553): Microelectromechanical Systems
Basic integrated circuit (IC) manufacturing process; electronics deivices fundamentals; microelectromechanical systems fabrications including surface micromachining, bulk micromachining, LIGA and others. Introduction to microactuators and microsensors such as micromotors, grippers, accelerometers and pressure sensors. Mechanical and electrical issues in micromachining. IC CAD tools to design microelectromechanical structures using MCNC MUMPS service. Design projects.
Semesters offered: Winter
(c) 2006 University of Michigan Design Lab