Professor, Mechanical Engineering
Professor, Electrical Engineering and Computer Science
Address
2658
Email
Phone
(734) 615-5211
Degrees
Ph.D., Materials Science and Engineering, Stanford University, 1998
M.S., Materials Science and Engineering, Stanford University, 1994
B.S., Precision Engineering, University of Tokyo, 1992
Research Interests
Microelectromechanical systems; microscale thermal engineering and design; heat transfer in micro/nano structures; semiconductor processing for micromechanical structure fabrication; microfluidic device; sensors and actuators.
Honors and Awards
Wise-Najafi Prize for Engineering Excellence in the Miniature World Award, College of Engineering, University of Michigan, 2018-19
Outstanding Professor Award, Pi Tau Sigma, April 2007
Visiting Professorship, Tokyo Instutute of Technology, May 2006 - August 2006
Early Faculty Career Development (CAREER) Award, National Science Foundation, January 2001-December 2005
Robert Caddell Memorial Award, The University of Michigan, 2004-2005
Co-author of SPIE Best Student Paper Award (with Yi-Chung Tung), "Nano-Imprinted Strain-Controlled Elastomeric Gratings for Optical Wavelength Tuning with Visible Light", Optics East 2004, October 2004
Outstanding Paper Award, International VLSI Multilevel Interconnection Conference, 1998
Best Paper Award, TECHCON, Semiconductor Research Corporation (SRC), September 1998
Faculty Type
Tenured and Tenure-Track